About: http://webisa.webdatacommons.org/179215002

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The feature 21 is formed over a conductive feature 27, typically a metal such as aluminum (Al) or copper (Cu), formed in a dielectric substrate 25.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es