| http://www.w3.org/ns/prov#value | - Then, a contact hole is formed on the interlayer insulating film to form electrodes and wirings 20 a, 20 b and 20 c of a peripheral driving circuit TFT, and electrodes and wirings 20 d and 20 e of a matrix pixel circuit TFT with a multiple layer formed of a metal material such as a titanium nitride and aluminum.
|
