PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • The substrate 110, 120 of each wafer 101, 102 typically comprises a semiconductor material, such as Silicon (Si), Gallium Arsenide (GaAs), or SiGe.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com