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About:
http://webisa.webdatacommons.org/179290958
Property
Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value
The material of the insulating layer (the second layer) 26 may be either the same material used for the insulating film (the first layer) 25, i.e., silicon nitride, or another insulating material such as silicon oxide or the like.
http://www.w3.org/ns/prov#wasQuotedFrom
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