About: http://webisa.webdatacommons.org/17940921

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Formed as the barrier layer 2003 is a porous film through which the metal element (here, mainly nickel) can move to a gettering site but an etchant for use in the step of removing the gettering site cannot permeate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com