About: http://webisa.webdatacommons.org/179416049

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The gate insulator layer 8 can be composed of substances such as silicon oxide (SiO2), silicon nitride (Si3N4), aluminum oxide (Al2O3), titanium oxide (TiO2), barium strontium titanium oxide (BaSrTiO3), and tantalum oxide (Ta2O5).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com