About: http://webisa.webdatacommons.org/179450096

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Further, a doped silicon layer or a metal such as aluminum or tungsten is formed at 2000-6000 ???, e.g., 3000 ??? on the insulating layer 53 and patterned to form a gate electrode 56 on each island.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de