About: http://webisa.webdatacommons.org/179613703

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Further, the ion implantation method is a method in which an ionized gas is mass-separated with an ion implantation apparatus and a single crystal semiconductor substrate is irradiated with the gas.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es