About: http://webisa.webdatacommons.org/179987340

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Additionally, refractory metals, such as Ta, are difficult to deposit using chemical vapor deposition.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com