About: http://webisa.webdatacommons.org/18000576

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, other highly conductive materials and shapes may be utilized depending upon the material being sputtered and other factors.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr