About: http://webisa.webdatacommons.org/180019115

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Further, such dielectric films may be formed by ALD reactions processed at relatively low temperatures, such as 250??? C., may be amorphous and possess smooth surfaces.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com