About: http://webisa.webdatacommons.org/18013245

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	To provide the electrode material with an additional material in order to tune the work function, modified deposition cycles are repeated M times within the process step 703, where M is an integer between 1 and 100.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com