About: http://webisa.webdatacommons.org/180502879

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thus, damages such as fall or peeling of a pattern formed on the substrate can be reduced.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com