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Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The insulation layer 30 (FIG. 1C) can comprise an electrically insulating material, such as BPSG (borophosphosilicate glass), a polymer (e.g., polyimide) or an oxide (SiO2).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com