About: http://webisa.webdatacommons.org/180642270

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The contacts 18 to the polycrystalline silicon row lines are made through openings 36 in the protective layer 35 as shown in FIG. 4 filled with a conductor such as aluminum.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com