About: http://webisa.webdatacommons.org/180897238

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The accelerometer as claimed in claim 10 wherein the material is a semiconductor material.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au