| http://www.w3.org/ns/prov#value | - The amount of the metal oxide dissolver component to be added in the present invention is designed to be preferably 0.001 to 10 g, more preferably 0.01 to 1 g and particularly preferably 0.01 to 0.5 g based on the polishing slurry of 100 g in gross weight.
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