About: http://webisa.webdatacommons.org/181000238

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The problem is especially severe when larger aspect ratio holes, i.e., having an aspect ratio of larger than 8, is formed in modern IC devices that uses 0.18 ??m technology.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com