PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • The single crystalline material forming the layer 138 is deposited by suitable means, such as molecular beam epitaxy, chemical vapor deposition, or other suitable processes.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com