About: http://webisa.webdatacommons.org/181053138

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thus, the rotational and horizontal driving of the roller can be veryaccurately controlled.Next, the substrate support 140 is a component on which the substrate S is placed.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com