About: http://webisa.webdatacommons.org/181172729

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The variation of the thickness of the overlay across the surface is preferably less than ???0.75 ??m, particularly less than ???0.5 ??m and especially less than ???0.25 ??m.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com