About: http://webisa.webdatacommons.org/181177451

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This embodiment uses ClF3 as an etching gas and also an oxygen-containing gas, such as O2.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au