About: http://webisa.webdatacommons.org/181193495

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The process of claim 1 wherein said substrate is a body of semiconductor material and said film of silicon nitride has a thickness of from about 200 to about 1200 Angstroms.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au