About: http://webisa.webdatacommons.org/181196738

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The semiconductor device is a semiconductor device with low on state resistance whose hetero-semiconductor and semiconductor body are not damaged by the ion etching process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com