About: http://webisa.webdatacommons.org/181204879

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When the CMP is carried out to form the W plugs, heavy metals such as Fe included in the residual slurry on the interlayer film 100 is remained even after the cleaning step.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com