About: http://webisa.webdatacommons.org/181224551

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The deflection is achieved by electrostatic action through application of voltage across a gap between an electrode (on the bottom wafer) and the structure, e.g. the mirror.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com