About: http://webisa.webdatacommons.org/181806363

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Using the metal layer left behind as an etch mask, the pattern can be further transferred to the substrate 4 (FIG. 1(d)) by various etching methods, for example reactive ion etching (RIE).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com