About: http://webisa.webdatacommons.org/181817981

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	shielding film made of e.g. a metal, a nitride, a carbide, an absorptive oxide or a mixture thereof, numeral 83 indicates an oxidation barrier film, and numeral 84 indicates an oxide film.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com