About: http://webisa.webdatacommons.org/181864596

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	silicon dioxide is formed on the upper surface of the silicon by a suitable method, such as by oxidation.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com