About: http://webisa.webdatacommons.org/182019231

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For higher volumes, other techniques can be used such as the processes used to manufacture semi-conductors.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com