About: http://webisa.webdatacommons.org/182266569

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, if the conductive film is a W film, the film is etched properly by using mixture gas of CF4 an
http://www.w3.org/ns/prov#wasQuotedFrom	google.com