About: http://webisa.webdatacommons.org/182318150

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, it is to be understood that the method and apparatus will function quite successfully for other types of articles, such as photolithographic masks, and for other types of treatment.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr