| http://www.w3.org/ns/prov#value | - Wafer support 40 is of a one piece, unitary construction formed preferably of silicon carbide and is preferably coated with a layer of thermally absorbing material such as silicon so that the support is comprised of a homogenous material and acts as a black body that is subject to uniform heating, without any hot spots that tend to be transferred to the wafer 28.
|
