About: http://webisa.webdatacommons.org/182720438

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIGS. 1a and 1b are each an example of taper etching of a 2 ??m-thick film 2 comprising aluminum or an alloy mainly composed of aluminum, such as aluminum-silicon, deposited on a silicon substrate 1.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com