About: http://webisa.webdatacommons.org/182975240

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Further, by this heat treatment, the damage caused by anisotropic etching such as RIE is recovered (FIG. 2B).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com