About: http://webisa.webdatacommons.org/183091696

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Additionally, the low-k film 4 is a coat-type insulating film or a plasma-CVD (Chemical Vapor Deposition) film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com