About: http://webisa.webdatacommons.org/183187789

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	(1) Coat a temporary substrate (e.g. glass, silicon, sapphire, ceramic, or other material) with a first dielectric material.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de