About: http://webisa.webdatacommons.org/183346794

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, there is a problem in that the etchant causes deterioration in reproducibility of a circuit pattern in such a case.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es