About: http://webisa.webdatacommons.org/183397659

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, as shown in FIG. 6B, the area directly underneath the drive or sense fingers of a MEMS device is covered by metal, and the gap between the Si and the metal is placed other than under the finger.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com