About: http://webisa.webdatacommons.org/183493957

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, by supplying the gas including the active species as described above, the crystal growth and etching processes can be both carried out appropriately and the {100} planes are formed just as intended.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com