About: http://webisa.webdatacommons.org/183557905

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, there is a problem in that the inner wall surface of the processing container may be sputtered so as to be damaged.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com