About: http://webisa.webdatacommons.org/183864811

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 2 is a schematic cross sectional view showing the state where helicon wave plasma and ICP are excited in a dry etching apparatus which is a first embodiment of this invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com