About: http://webisa.webdatacommons.org/184222002

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Alkyl compounds and hydrides gases, doping gases producing carrier concentrations regulated by flow rates, and a carrier gas such as hydrogen are introduced into the reaction tube 22 through the gas inlet 21.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com