About: http://webisa.webdatacommons.org/184287550

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Also, in the present invention, one of the substrates is held by a vacuum-chuck by providing one of the surface plates with holes or grooves, through which air is drawn, in the above cell gap forming process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com