About: http://webisa.webdatacommons.org/184390208

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 3 c is are a cross sectional view of the embodiment of FIG. 3 b in a stretched configuration in response to differential thermal expansion of chip and substrate;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com