About: http://webisa.webdatacommons.org/184440216

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Specifically, using the gate electrode 20 as a mask, a p-type dopant such as boron (B) is implanted at a low energy into the pMOS area and an n-type dopant such as arsenic (As) into the nMOS area.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com