About: http://webisa.webdatacommons.org/184708280

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Impurities such as phosphorous and boron may be used to enhance flow characteristics for deposition of dielectric layers 18 and 19.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com