About: http://webisa.webdatacommons.org/184832265

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIGS. 5a and 5 b are a cross section and plan view of a hole in the polishing pad filled with window material with a release film held over the bottom of the hole and a release film held over the top of the hole;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com