About: http://webisa.webdatacommons.org/185192449

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	If there is an alignment error or other errors, a small shadowed portion or shelf portion is formed above the contact hole 105a under the silicon oxide film 108.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de