About: http://webisa.webdatacommons.org/185529376

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It should be noted that the susceptor 32 is formed of, for example, a ceramic material such as AlN so that a ceramic heater is constituted in a state where the heater 35 is embedded in the ceramic material.A showerhead 40 is provi
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com